| 摘要 |
<p>This disclosure provides systems methods and apparatus for providing packaged microelectromechanical systems (MEMS) devices. In one aspect package can include a cover glass joined to a device substrate the cover glass including integrated electrical connectivity and configured to encapsulate one or more MEMS devices on the device substrate. The cover glass can include one or more spin on glass layers and electrically conductive routing and interconnects. The package can include a narrow seal surrounding the one or more encapsulated MEMS devices.</p> |
