Defect Review Apparatus, Defect Review Method

摘要

Provided is a defect review technique that can accurately correct coordinate differences with respect to unusual defects in which it is difficult to accurately correct coordinate misalignments by conventional automatic fine alignment. If it is impossible to correct a coordinate misalignment on the basis of a first optical microscope image acquired by a first light source, a defect review apparatus according to the present invention acquires a second optical microscope image using a second light source, and determines whether it is possible to correct the coordinate misalignment on the basis of the second optical microscope image.

主权项

1. A defect review apparatus that acquires a defect image on a sample according to coordinate information of a defect on the sample detected by an inspection apparatus, comprising:
an optical microscope unit that creates an optical microscope image of the defect using a signal generated by irradiating light onto the sample; a defect information storage that stores defect information describing a coordinate of the defect that is acquired by the inspection apparatus when detecting the defect on the sample; and an optical microscope controller that corrects a coordinate misalignment between the inspection apparatus and the defect review apparatus according to an optical microscope image acquired by using the optical microscope unit; wherein the optical microscope unit includes a first and a second light sources each irradiating different types of light from each other, wherein the optical microscope controller determines, according to a feature of a first optical microscope image acquired by the optical microscope unit using the first light source with respect to an coordinate of the defect described in the defect information, whether it is possible to correct an coordinate misalignment between the inspection apparatus and the defect review apparatus using the first optical microscope image, wherein if the first optical microscope image is not appropriate for coordinate correction, the optical microscope controller switches the first light source into the second light source to acquire a second optical microscope image, and wherein the optical microscope controller determines whether it is possible to correct the coordinate misalignment using the second optical microscope image.