| 摘要 |
A substrate transfer device receives two substrates from an upper ID unit using two arms among three arms. The substrate transfer device transfers the substrate to each processing unit of a processing block, and receives the substrate from the same using an arm, which does not keep the substrate; and an arm keeping the substrate to be processed in the processing block among the received two substrates. While the substrate is being processed in the processing unit, a sheet of the substrates is kept by the arm receiving the substrate. The two substrates are transferred to the processing block on a lower part using the arm keeping a substrate processed in the processing block and the arm keeping the substrate. |
