| 摘要 |
The present invention relates to a substrate transfer device. According to the present invention, the substrate transfer device comprises: a roller having a stepped outer circumference surface formed so that an outer diameter at one side end is greater than an outer diameter at the other side end, and rotating to transfer a substrate; an O-ring installed on part of the outer circumference surface of the roller, having an outer diameter smaller than the outer diameter at the other side end of the roller, and being in contact with part of one side of the substrate to be able to transfer the substrate; and an O-ring fixture binding the O-ring not to be positionally separated, and coupled to one side end of the roller. Accordingly, the transfer obstruction of a substrate caused by the positional separation of the O-ring does not occur as the positional separation of the O-ring mounted on the roller is inhibited. Therefore, in a process, the danger of process proceeding being stopped and a defect being generated, which are caused by the transfer obstruction of a substrate, is reduced significantly. Also, a substrate can be transferred smoothly as the substrate transfer device has a simple structure, the roller can be maintained and repaired easily and the position of the O-ring of the roller is fixated stably. |
