SENSOR SUBSTRATE, METHOD OF MANUFACTURING THE SAME, AND DISPLAY APPARATUS HAVING THE SAME

摘要

A sensor substrate includes a base substrate, and a sensing transistor and a switching transistor, which are on the base substrate. The sensing transistor includes a first gate electrode, an optical response pattern on the first gate electrode, a first source electrode and a first drain electrode on the optical response pattern and spaced apart from each other, a first oxide semiconductor pattern between the first source electrode and the optical response pattern, and a second oxide semiconductor pattern between the first drain electrode and the optical response pattern. The switching transistor includes a second gate electrode, a third oxide semiconductor pattern on the second gate electrode, and a second source electrode and a second drain electrode on the third oxide semiconductor pattern to be spaced apart from each other.

主权项

1. A sensor substrate comprising:
a base substrate; a sensing transistor on the base substrate, and comprising:
a first gate electrode;an optical response pattern on the first gate electrode;a first source electrode and a first drain electrode, which are on the optical response pattern and spaced apart from each other;a first oxide semiconductor pattern between the first source electrode and the optical response pattern; anda second oxide semiconductor pattern between the first drain electrode and the optical response pattern, and a switching transistor on the base substrate, and comprising:
a second gate electrode;a third oxide semiconductor pattern on the second gate electrode; anda second source electrode and a second drain electrode, which are on the third oxide semiconductor pattern and spaced apart from each other.