发明名称 |
SILICON-ON-INSULATOR FINFET WITH BULK SOURCE AND DRAIN |
摘要 |
Embodiments of the invention provide a semiconductor structure including a finFET having an epitaxial semiconductor region in direct physical contact with a plurality of fins, wherein the epitaxial semiconductor region traverses an insulator layer and is in direct physical contact with the semiconductor substrate. The gate of the finFET is disposed over an insulator layer, such as a buried oxide layer. Methods of forming the semiconductor structure are also included. |
申请公布号 |
US2015287727(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
US201514742537 |
申请日期 |
2015.06.17 |
申请人 |
GLOBALFOUNDRIES Inc. |
发明人 |
Liu Yanxiang;Chi Min-hwa |
分类号 |
H01L27/092;H01L29/66;H01L21/8238;H01L29/16;H01L27/12 |
主分类号 |
H01L27/092 |
代理机构 |
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代理人 |
|
主权项 |
1. A semiconductor structure comprising:
a semiconductor substrate; an insulator layer disposed on the semiconductor substrate; a plurality of fins disposed on the semiconductor structure; an epitaxial semiconductor region in direct physical contact with the plurality of fins, wherein the epitaxial semiconductor region traverses the insulator layer and is in direct physical contact with the semiconductor substrate; and a gate region disposed on the insulator layer. |
地址 |
Grand Cayman KY |