发明名称 |
ACCELERATION SENSOR |
摘要 |
Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area. |
申请公布号 |
WO2015151946(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
WO2015JP59015 |
申请日期 |
2015.03.25 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
HAYASHI MASAHIDE;JEONG HEEWON |
分类号 |
G01P15/125;G01P15/08;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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