发明名称 Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel
摘要 An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.
申请公布号 US2015287575(A1) 申请公布日期 2015.10.08
申请号 US201514742402 申请日期 2015.06.17
申请人 MKS Instruments, Inc. 发明人 Hu Chaolin;Chen Xing
分类号 H01J37/32 主分类号 H01J37/32
代理机构 代理人
主权项 1. An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising: a toroidal plasma chamber, wherein the toroidal plasma chamber comprises a first injection member, an output member, a first side member and a second side member, the first side member connecting a first end of the first injection member and the output member and the second side member connecting a second end of the injection member and the output member, wherein: the first side member has a diameter that is different from the diameter of the second side member; and a first gas injector for injecting a first gas into the toroidal plasma chamber through the first end of the first injection member and a second gas injector for injection a second gas into the toroidal plasma chamber through the second end of the first injection member, the injection of the first and second gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber, wherein the first gas and the second gas are different gasses.
地址 Andover MA US