发明名称 LASER PROCESSING MACHINE AND LASER PROCESSING METHOD
摘要 In conventional laser processing machines and laser processing methods, there have been cases where a porous sheet that is provided between a processing table and a workpiece is peeled or shifted at the time of removing the workpiece from the processing table. This laser processing machine has: a processing table (1), which has a plurality of first through holes (4) and a plurality of second through holes (5); a first flow channel (6); a second flow channel (7); a first pump (8); a second pump (9); and a laser irradiation means (10). The second through holes are independent from the first through holes. The first flow channel is connected to the first through holes. The second flow channel is independent from the first flow channel, and is connected to the second through holes. The first pump is connected to the first flow channel, and has a sucking function. The second pump is connected to the second flow channel, and has an air-releasing function.
申请公布号 WO2015151141(A1) 申请公布日期 2015.10.08
申请号 WO2014JP06191 申请日期 2014.12.12
申请人 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. 发明人 NISHIHARA, MANABU;MURAKOSHI, TOSHIICHI;SASAKI, YOSHINORI
分类号 B23K26/10;B23K37/04;H05K3/00 主分类号 B23K26/10
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