X-RAY INSPECTION APPARATUS FOR INSPECTING SEMICONDUCTOR WAFERS

摘要

An x-ray inspection system comprising: an x-ray source (100), a sample support (200) for supporting a sample to be inspected, an x-ray detector (300), a sample positioning assembly (210) including a first positioning mechanism (210) for moving the sample support (200) along a first axis towards and away from the x-ray source (100), a proximity sensor (400) fixed to the x-ray source (100) configured to provide a measurement of distance between the x-ray source (100) and a surface of a sample on the sample support (200); and a controller (500) connected to the proximity sensor (400). Measurements from the proximity sensor (400) can be used in image processing calculations and to prevent collision between a sample and the x-ray source (100).