METHOD FOR PRODUCING DEPOSITION MASK

摘要

The invention provides a method for producing a deposition mask that includes forming of an opening pattern 1 at a predetermined position in a resin film 2 by laser processing so as to penetrate therethrough. The method including the steps of: forming a meniscus of a liquid film 14 between the resin film 2 and a smooth surface 13b of a reference substrate 13 supporting the resin film 2; and after the resin film 2 and the reference substrate 13 are brought into close contact with an adsorption force generated by Laplace pressure, forming the opening pattern 1 by performing the laser processing. Accordingly, it is possible to increase the speed of the laser processing without generating a burr on an edge portion of the opening pattern.

主权项

1. A method for producing a deposition mask, the method comprising:
forming an opening pattern at a predetermined position in a resin film by laser processing so as to penetrate therethrough, the forming of the opening pattern comprising the steps of:
forming a meniscus of a liquid film between the resin film and a smooth surface of a support substrate supporting the resin film; andafter the resin film and the support substrate are brought into close contact with an adsorption force generated by Laplace pressure, forming the opening pattern by performing the laser processing.