| 摘要 |
The present invention provides a processing device capable of efficiently performing a drying and a curing process of an organic material layer coated on a substrate. An electromagnetic wave irradiation device (5) irradiating an electromagnetic wave to an organic material layer comprises: an electromagnetic wave source (21); an antenna unit (23) inducing the electromagnetic wave generated from the electromagnetic wave source to a processing container (1); a waveguide (25) connecting the electromagnetic wave source (21) and the antenna unit (23); a transmitting cover (27) covering the antenna unit (23). In the processing device (100), the electromagnetic wave may be irradiated in a plate shape according to an area toward the substrate (S) corresponded from the antenna unit (23) by configuring the antenna unit (23) by arranging a plurality of radiation antennas (35) having multiple slots (33). |
