| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow control valve which maintains a fixed flow rate in the state where cleanliness of a fluid is higher, and further is capable of changing setting oa a fluid flow rate range, and a flow control device.SOLUTION: In a flow control valve 10A, a first rod-like movable part 40 that moves back and forth together with a first diaphragm 30 is disposed in a second chamber 22, and a second rod-like movable part 50 that moves back and forth together with a second diaphragm 35 is disposed in a fourth chamber 27. A see-saw member 80 is disposed which is engaged with the first and second rod-like movable parts 40 and 50 and pivoted at a midpoint position in a length direction so as to be oscillated and transmits fluctuation of one rod-like movable part 40 (50) to the other rod-like movable part 50 (40). The forward/backward movement of the first and second diaphragms 30 and 35 caused by pressure fluctuation before and behind a throttle part 15 is transmitted to the diaphragms 30 and 50 via rotation of the see-saw member 80, and a valve element 38 is moved forward and backward relatively to a valve seat 16 through the forward and backward movement of the first and second diaphragms 30 and 35.</p> |
