MONOLITHIC CERAMIC COMPONENT OF GAS DELIVERY SYSTEM AND METHOD OF MAKING AND USE THEREOF

摘要

A method of making a monolithic ceramic component of a gas delivery system of a semiconductor substrate processing apparatus wherein the gas delivery system is configured to supply process gas to a gas distribution member disposed downstream thereof. The gas distribution member is configured to supply the process gas to a processing region of a vacuum chamber of the apparatus, wherein the processing region is disposed above an upper surface of a semiconductor substrate to be processed. The method comprises preparing a green compact of ceramic material. The green compact of ceramic material is formed into a form of a desired monolithic ceramic component of the gas delivery system. The formed green compact of ceramic material is fired to form the monolithic ceramic component of the gas delivery system.

主权项

1. A method of making a monolithic ceramic component of a gas delivery system of a semiconductor substrate processing apparatus, the gas delivery system configured to supply process gas to a gas distribution member disposed downstream thereof, the gas distribution member configured to supply the process gas to a processing region of a vacuum chamber of the apparatus, wherein the processing region is disposed above an upper surface of a semiconductor substrate to be processed, the method of making the monolithic ceramic component comprising:
preparing a green compact of ceramic material; forming the green compact of ceramic material into a form of a desired monolithic ceramic component of the gas delivery system; and firing the formed green compact of ceramic material to form the monolithic ceramic component of the gas delivery system.