HIGH-FREQUENCY PROBE AND MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-frequency probe and a measuring device capable of suppressing multiple reflection and stably measuring high frequency characteristics.SOLUTION: A high-frequency probe 30 comprises: a probe body 1; a probe arm section 2 on which a transmission line 21 extending from the probe body 1 is provided; and a plurality of tip end portions 9 and 10 provided on a tip end of the probe arm section 2, formed of a conductive material, and connected to a signal conductor 22 and ground conductors 23, respectively. The transmission line 21 includes the signal conductor 22 and the ground conductors 23 extending on both sides of the signal conductor 23, respectively. The signal conductor 22 and the ground conductors 23 constitute a coplanar line. A high-resistance metal material whose surface is not plated is used for the tip end portions 9 and 10. Preferably, a material selected from a group consisting of NiCr, NiCrFe, NiCrFeMn, and CrFeAl is used. By using the high-resistance metal for the tip end portions 9 and 10, a serial resistance value in a DC (direct-current) manner is set to not less than 10Ωand not more than 50Ω.