ELECTROMECHANICAL TRANSDUCER ELEMENT, METHOD OF PRODUCING ELECTROMECHANICAL TRANSDUCER ELEMENT, INKJET RECORDING HEAD, AND INKJET RECORDING APPARATUS

摘要

An electromechanical transducer element includes a substrate; a common electrode disposed on the substrate; an electromechanical transducer film formed on the common electrode; an individual electrode formed on the electromechanical transducer film; a common electrode pad electrically connected to the common electrode; an individual electrode pad electrically connected to the individual electrode; and an insulation protective film formed on the common electrode and the individual electrode, contacting an upper end of the individual electrode pad, and surrounding a side surface of the individual electrode pad. The insulation protective film has a gradually decreasing thickness outward from an end of the individual electrode pad.

主权项

1. An electromechanical transducer element comprising:
a substrate; a common electrode disposed on the substrate; an electromechanical transducer film formed on the common electrode; an individual electrode formed on the electromechanical transducer film; a common electrode pad electrically connected to the common electrode; an individual electrode pad electrically connected to the individual electrode; and an insulation protective film formed on the common electrode and the individual electrode, contacting an upper end of the individual electrode pad, and surrounding a side surface of the individual electrode pad, the insulation protective film having a gradually decreasing thickness outward from an end of the individual electrode pad.