| 发明名称 |
POLISHING COMPOSITION |
| 摘要 |
This polishing composition includes hydroxyethyl cellulose, water, and abrasive grains. The hydroxyethyl cellulose has a molecular weight of at least 500000, but not more than 1500000. The mass ratio of the hydroxyethyl cellulose to the abrasive grains is at least 0.0075, but not more than 0.025. |
| 申请公布号 |
WO2015152150(A1) |
申请公布日期 |
2015.10.08 |
| 申请号 |
WO2015JP59923 |
申请日期 |
2015.03.30 |
| 申请人 |
NITTA HAAS INCORPORATED |
发明人 |
TERAMOTO, MASASHI;NAKAUCHI, TATSUYA;SUGITA, NORIAKI;HABA, SHINICHI;MIYAMOTO, AKIKO |
| 分类号 |
C09K3/14;B24B37/00;H01L21/304 |
主分类号 |
C09K3/14 |
| 代理机构 |
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代理人 |
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