摘要 |
<p>PROBLEM TO BE SOLVED: To provide a crystal vibrator which prevents frequency shift from occurring by eliminating the distortion exerted on a crystal piece by a metal electrode film.SOLUTION: Disclosed is a crystal vibrator having a metal electrode film 3 on one place of a crystal piece 2. The metal electrode film 3 has a laminated structure formed by laminating a first metal film 4, a second metal film 5, and a third metal film 6 in this order. Furthermore, the stress directions of these first metal film 4 and second metal film 5 based on the material quality and film thickness are made opposite to each other so as to eliminate mutual stress after heating, and influence due to the distortion of the crystal vibrator is eliminated.</p> |