| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve measurement reliability of impurity density in a BPSG film by a fluorescent X-ray analyzer.SOLUTION: A measurement method of impurity density in a thin film measures the film thickness of a BPSG film sample by using a fluorescent X-ray analyzer and optical film thickness meter to calculate a reference film thickness ratio, measures the film thickness of a daily analysis sample by using the fluorescent X-ray analyzer and optical film thickness meter to calculate a sample film thickness ratio, and determines that B, P density obtained by the fluorescent X-ray analyzer is correct if the reference film thickness ratio and the sample film thickness ratio are close.</p> |
