OPTICAL WAVEGUIDE DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide device suppressing a defective element end face, and a manufacturing method of the optical waveguide device.SOLUTION: The optical waveguide device comprises: a lower clad layer 11 formed on a semiconductor substrate 10; an upper clad layer 13; a core layer 12 formed between the lower clad layer 11 and the upper clad layer 13; and a protection film 14 formed covering the optical waveguide. The protection film 14 is removed in a range of an emission end face of the optical waveguide device to a predetermined position on the optical waveguide.