CARBON DIOXIDE GAS LASER OSCILLATOR WHICH CAN ESTIMATE COMPOSITION RATIO OF LASER GAS

摘要

A laser gas estimation device includes a laser oscillator including a ventilator which circulates a laser gas, a discharge tube, a ventilator power unit which supplies power to the ventilator, and a discharge tube power unit which supplies power to the discharge tube, a detection unit which detects gas pressure of the laser gas, ventilator voltage applied to the ventilator, ventilator current supplied to the ventilator, discharge tube voltage applied to the discharge tube, and discharge tube current supplied to the discharge tube, and a composition ratio estimation unit which estimates the composition ratio of the laser gas based on a detected value detected by the detection unit.

主权项

1. A laser gas estimation device which estimates a composition ratio of laser gas mainly composed of one or a plurality of carbon dioxide gas, nitrogen gas, and helium gas, the laser gas estimation device comprising:
a laser oscillator enclosing the laser gas and comprising a ventilator which circulates the laser gas, a discharge tube, a ventilator power unit which supplies power to the ventilator, and a discharge tube power unit which supplies power to the discharge tube; a detection unit which detects at least one of a gas pressure of the laser gas enclosed in the laser oscillator, a ventilator voltage applied to the ventilator, a ventilator current supplied to the ventilator, a discharge tube voltage applied to the discharge tube, and a discharge tube current supplied to the discharge tube; and a composition ratio estimation unit which estimates the composition ratio of the laser gas based on a detected value detected by the detection unit.