Micro Normally-Closed Structure and Method for Manufacturing the Same

摘要

The present invention relates to a micro normally-closed structure, which is manufactured by a MEMS process and used as a MEMS component. The structure includes a base and a fixed contact; and a flexible arm including a first end and a movable contact, wherein the first end is electrically connecting to the base, and remaining a normally closed electrically conducting state between the movable contact and the fix end.

主权项

1. A method for manufacturing a micro normally-closed structure, comprising:
providing a flexible arm, a transient base and a fixed contact, wherein the flexible arm including a first end and a movable contact, wherein the position of the first end is corresponding to the transient base, and the position of the movable contacts is corresponding to the fixed contact; and generating an electrically conducting state between the movable contact and the fixed contact, in which the first end is anchored to the position of the transient base to remain the electrically conducting state.