QUARTZ TUBE CLEANING APPARATUS, AND METHOD OF CLEANING OF THE SAME

摘要

Provided is a cleaning apparatus of a quartz tube. The cleaning apparatus of a quartz tube includes: a first cleaning tub supplied with a first cleaning solution; and a first circulating horse configured to be positioned in a quartz tube arranged in the first cleaning tub. The first circulating horse includes: one end for receiving compressed air; and a sidewall having a plurality of pores through which the compressed air is discharged.