PLASMA SYSTEM

摘要

A plasma system of the present invention according to the present invention includes: a nozzle including an outer circumferential side, which is exposed to the outside, an inner circumferential side, which faces the outer circumferential side and comes in contact with gas, and an outlet for spraying the gas; a first electrode formed on a portion of the outer circumferential side or the inner circumferential side; and a second electrode which is formed on a portion of the outer circumferential side while being separated from the first electrode. The first electrode is electrically connected to a first power supply having a first voltage. The second electrode is electrically connected to a second power supply having a second voltage different from the first voltage. The second electrode is formed on a location closer to the outlet than a location of the first electrode.