摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which includes a field stop region and prevents ringing from being generated in a voltage rising waveform during turning-off.SOLUTION: The semiconductor device includes: a collector region of a first conductivity type; a field stop region of a second conductivity type disposed on the collector region; a drift region of the second conductivity type which is disposed on the field stop region and of which the impurity concentration is lower than that of the field stop region; a base region of the first directivity type disposed on the drift region; and an emitter region of the second conductivity type disposed on the base region. An impurity concentration gradient in a film thickness direction of the field stop region is greater in a region neighboring the collector region than that in a region neighboring the drift region. |