ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor being capable of detecting angular velocity about three-axes while reducing impedance and improving detection sensitivity.SOLUTION: An angular velocity sensor 1 comprises: an annular portion 20 annularly extending with an intersection point O between an X-axis and a Y-axis as viewed in a Z-axis direction as a center; four first arm portions 21 through 24 extending to an inside of the annular portion 20 from individual intersection portions among four virtual lines L1 through L4 radially extending to individual four virtual regions partitioned by the X-axis and the Y-axis from the intersection point O and the annular portion 20; a pair of holding sections 35 and 36 extending on the X-axis from individual intersection portions between the X-axis and the annular portion 20; and second arm portions 25 through 28 extending along the Y-axis from individual ones of the pair of holding sections 35 and 36. Two out of four arm portions 21 through 24 are driving sections 40, the other two are first detecting sections 50 detecting angular velocity about the X-axis and the Y-axis and the second arm portions 25 through 28 are second detecting sections 60 detecting angular velocity about the Z-axis.