发明名称 |
COATING FILM IMAGE ANALYSIS DEVICE AND COATING FILM ANALYSIS METHOD |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating film analysis device and a coating film analysis method that can accurately analyze with a simple configuration as to each layer formed by having a plurality of layers laminated.SOLUTION: The present invention relates a coating film analysis device analyzing a coating film (9) made up of a plurality of layer, and a light source (1); a measurement probe (16) that irradiates the coating film with irradiation light and receives reflection light from the coating film; a reference light generation unit (14) that generates reference light from light source light; an optical measurement unit (54) that measures a tomographic structure as an optical distance on the basis of interference light with th reflection light and th reference light; and image processing unit (56) that outputs a tomographic structure as a tomographic image by converting the measured tomographic structure into a mechanical distance on the basis of a refractive index having the tomographic structure preliminarily measured.</p> |
申请公布号 |
JP2015178980(A) |
申请公布日期 |
2015.10.08 |
申请号 |
JP20140055760 |
申请日期 |
2014.03.19 |
申请人 |
TY-TECHNO CORP;YAMAGATA PREFECTURE |
发明人 |
KUDO MIKIKO;TAKAHASHI YOSHIYUKI;HASHIMOTO TOMOAKI;KONNO SHUNSUKE |
分类号 |
G01N21/17;G01B11/06 |
主分类号 |
G01N21/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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