| 发明名称 |
MEMS Structure and Method of Forming Same |
| 摘要 |
A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air. |
| 申请公布号 |
US2015288297(A1) |
申请公布日期 |
2015.10.08 |
| 申请号 |
US201514745696 |
申请日期 |
2015.06.22 |
| 申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Tsai Yi Heng;Chu Chia-Hua;Chang Kuei-Sung |
| 分类号 |
H02N1/00 |
主分类号 |
H02N1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical system (MEMS) device comprising:
a substrate; a movable element at least partially suspended above the substrate and having at least one degree of freedom; and a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air. |
| 地址 |
Hsin-Chu TW |
