Seed Crystal Substrates, Composite Substrates and Functional Devices

摘要

A seed crystal substrate 8 includes a base body 1 and a plurality of rows of stripe-shaped seed crystal layers 3 formed on the base body 1. An upper face 3a of the seed crystal layer 3 is (11-22) plane, a groove 4 is formed between the adjacent seed crystal layers 3, and a longitudinal direction of the groove 4 is a direction in which a c-axis of a crystal forming the seed crystal layer is projected on the upper face. A nitride of a group 13 element is formed on the seed crystal substrate.

主权项

1. A composite substrate comprising a seed crystal substrate and a layer of a crystal of a nitride of a group 13 element grown on said seed crystal substrate, said seed crystal substrate comprising a base body and a plurality of rows of stripe-shaped seed crystal layers formed on said base body:
wherein an upper face of said seed crystal layer is (11-22) plane; wherein a groove is formed between said seed crystal layers adjacent to each other, and; wherein a longitudinal direction of said groove is a direction in which a c-axis of a crystal forming said seed crystal layer is projected on said upper face.