发明名称 |
A METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR GENERATING HIGH DENSITY REGISTRATION MAPS FOR MASKS |
摘要 |
A method and system for generating high density registration maps for masks is disclosed. A data preparation module generates a plurality of anchor points of the mask. Additionally, the data preparation module generates a plurality of sample points. Weights are generated as well in the data preparation module and the weights are used later on in the data fusion module. The positions of anchor points are measured with a registration tool in a mask coordinate system according to a generated recipe. The positions of sample points are determined with an inspection tool in a mask coordinate system according to a generated recipe. The measured positions of the anchor points and the measured positions of the sample points are passed to a data fusion module where a registration map is determined. |
申请公布号 |
WO2015153872(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
WO2015US24060 |
申请日期 |
2015.04.02 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
LASKE, FRANK;DANESHPANAH, MOHAMMAD M.;SUBRAHMANYAN, PRADEEP;XIONG, YALIN |
分类号 |
H01L21/027;H01L21/66 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|