OPTICAL MEASUREMENT DEVICE, AND MEASUREMENT METHOD USING SAME

摘要

An optical measurement device comprises a stage, a lens assembly, a camera, and an information processing member. A sample is disposed on the stage. The lens assembly irradiates light to the sample, and transfers light reflected from the sample. The camera converts the light transferred from the lens assembly to an image signal. The information processing member converts the image signal to a 1 bit image, primarily filters a small pixel region in the 1 bit image using a threshold value, and performs a secondary filtering which extracts a cross section of the image signal and changes a section, where the gap between pixel values of adjacent pixels becomes greater, to a 1-bit value identical to an adjacent pixel. Thus, measurement errors decrease.