| 摘要 |
A micro drive device (1) capable of multiaxial driving, said micro driving device being equipped with a movable object (3), and at least a pair of joists (4) axially supporting the movable object and provided in only one direction. The movable object (3) is characterized in that it resonates with one or more resonant frequencies possessed by the joists (4) and twists or bends, thereby undergoing translation or rotating in the x-axis, y-axis, and z-axis direction. Thus, the problems of an increase in the size of the structure and an increase in the complexity of the structure can simultaneously be avoided. |
