FIN DIODE STRUCTURE

摘要

A fin diode structure includes a doped well formed in a substrate, a plurality of fins of first conductivity type and a plurality of fins of second conductivity type protruding from the doped well isolated from ins of first conductivity type by STIs, at least one doped region of first conductivity type in the substrate between the fins of first conductivity type, the STIs and the doped well and connecting with the fins of first conductivity type, and at least one doped region of second conductivity type in the substrate between the fins of second conductivity type, the STIs and the doped well and connecting with the fins of second conductivity type. The doping concentration of the fins of first conductivity type is greater than that of the doped region of first conductivity type whose doping concentration is greater than that of the doped well of first conductivity type.

主权项

1. A fin diode structure, comprising:
a substrate; a doped well formed in said substrate; a plurality of fins of first conductivity type and a plurality of fins of second conductivity type protruding from said doped well, wherein said fins of first conductivity type and said fins of second conductivity type are isolated from each other by shallow trench isolations; at least one doped region of first conductivity type formed in said substrate between said fins of first conductivity type, a portion of said shallow trench isolations and said doped well and connecting with said fins of first conductivity type; and at least one doped region of second conductivity type formed in said substrate between said fins of second conductivity type, a portion of said shallow trench isolations and said doped well and connecting with said fins of second conductivity type, wherein said doped region of first conductivity type connects with said doped region of second conductivity type in said substrate to form a junction; wherein the doping concentration of said fin of first conductivity type is higher than the doping concentration of said doped region of first conductivity type, and the doping concentration of said doped region of first conductivity type is higher than the doping concentration of said doped well of first conductivity type.