OPTICAL WAVEGUIDE DEVICE MODULE

摘要

An optical waveguide device module has an optical waveguide device including an optical waveguide formed in a substrate, and a control electrode for controlling light; and a connection substrate including an interconnection, provided to the outside of the waveguide device, electrically connected to the control electrode. The control electrode includes ground electrodes that sandwich a signal electrode. The connection substrate has ground lines that sandwich a signal line. A width of the signal electrode in an input or output end is smaller than a width of the signal line on the waveguide device side. A distance between inner edges of the ground electrodes closest to the signal electrode, measured at an input or output end of the control electrode, is larger than a distance between inner edges of the ground lines closest to the signal line on the waveguide device side of the connection substrate.

主权项

1. An optical waveguide device module comprising:
an optical waveguide device including a substrate having an electro-optic effect, an optical waveguide formed in the substrate, and a control electrode for controlling light waves propagated through the optical waveguide; a connection substrate including an interconnection, provided to the outside of the optical waveguide device, which is electrically connected to the control electrode; and a casing that accommodates the optical waveguide device and the connection substrate therein, wherein the control electrode includes a signal electrode and ground electrodes disposed so as to sandwich the signal electrode, the connection substrate is provided with a signal line and ground lines disposed so as to sandwich the signal line, a dielectric constant of the connection substrate is lower than a dielectric constant of the substrate included in the optical waveguide device, a width S1 of the signal electrode in an input end or an output end is smaller than a width S2 of the signal line on an optical waveguide device side, a distance W1 between inner edges of the ground electrodes closest to the signal electrode, measured at an input end or output end of the control electrode, is larger than a distance W2 between inner edges of the ground lines closest to the signal line on the optical waveguide device side of the connection substrate, the control electrode has a portion in which the distance between the ground electrodes is smaller than the distance W2 in a portion away from the input end or the output end thereof, and the optical waveguide device module includes ground interconnections that connect the optical waveguide device and the ground lines of the connection substrate.