CENTRIFUGE MEMS STICTION DETECTION AND SCREENING SYSTEM AND METHOD

摘要

A centrifuge screening system and method of testing MEMS devices using the system. The wafer level centrifuge screening system can include a base centrifuge system and a cassette mounting hub coupled to the base centrifuge system. The method can include applying a smooth and continuous acceleration profile to one or more MEMS components via the base centrifuge system. Each of the one or more MEMS components can have one or more MEMS devices formed thereon. The one or more MEMS components can be provided in one or more cassettes configured on the cassette mounting hub. The method can also include identifying one or more target MEMS components, which can include identifying stiction in one or more MEMS devices on the one or more MEMS components.

主权项

1. A centrifuge screening system, the system comprising:
a base centrifuge system comprising a variable speed controller, a drive hub, and a protective enclosure; a cassette mounting hub coupled to the base centrifuge system; and one or more cassettes configured on the dove tail cassette mounting hub.