HEATED ELECTROSTATIC CHUCK

摘要

Heated electrostatic chucks are provided that can improve uniformity of heating of a substrate on the electrostatic chucks, and can improve thermal performance of an electrostatic chuck relative to other thermal performance goals. One electrostatic chuck includes a ceramic structural element having a sidewall surface on an outer perimeter of the electrostatic chuck, and at least one sidewall heater element disposed on or within at least a portion of the sidewall surface.