| 摘要 |
PROBLEM TO BE SOLVED: To provide a work holding device capable of surely desorbing a workpiece by weakening an adsorption force between the workpiece and an adsorption pad when desorbing the workpiece from the adsorption pad.SOLUTION: The workpiece holding device includes: a rigid body including an air hole; an adsorption pad connected to a lower end face of the rigid body and including an opening communicated to the air hole for adsorbing and holding a workpiece; and an air control mechanism which is communicated to the air hole and sucks or discharges air from the air hole to suck or discharge air from the opening. Air is sucked from the opening by the air control mechanism while bringing the workpiece into contact with the opening, such that the workpiece is adsorbed and held on the adsorption pad. Air is discharged from the opening, such that the workpiece is desorbed from the adsorption pad. When desorbing the workpiece from the adsorption pad, air is supplied from the air hole by the air control mechanism, such that at least a part of a contact face of the adsorption pad with the workpiece includes an expansion part that is expanded closer to the workpiece side. |
