| 摘要 |
PROBLEM TO BE SOLVED: To move a stage accurately along a predetermined path while linking between a plurality of heads.SOLUTION: An exposure apparatus comprises: an encoder system which measures positional information of a stage WST by a head facing lattice parts (39X, 39X, 39Y, 39Y) provided for the stage out of a plurality of heads (Enc1, Enc2, Enc3, Enc4, etc.); and a controller which controls the movement of the stage based on positional information to be measured. During the movement of the stage, one of the plurality of heads used for measurement is switched to another head, and after the switching, the positional information of the stage is measured by a plurality of heads including remaining heads other than the one head and the another head, and based on the positional information measured by the plurality of heads used before the switching, correction information for controlling the movement of the stage by using the another head after the switching is acquired. |
