发明名称 METHOD FOR MANUFACTURING ORGANIC EL APPARATUS, ORGANIC EL APPARATUS, AND ELECTRONIC DEVICE
摘要 A method for manufacturing an organic EL apparatus includes forming an organic EL element and a mounting terminal on a substrate of an element substrate as a first substrate, forming sealing films so as to cover at least the organic EL element and the mounting terminal, adhering a sealing substrate as a second substrate with respect to the element substrate using a filler, and etching the sealing films so as to expose at least a part of the mounting terminal, in which, in the etching of the sealing films, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask.
申请公布号 US2015287959(A1) 申请公布日期 2015.10.08
申请号 US201514661934 申请日期 2015.03.18
申请人 SEIKO EPSON CORPORATION 发明人 HANAMURA Yuki
分类号 H01L51/56;H01L51/00;H01L51/52 主分类号 H01L51/56
代理机构 代理人
主权项 1. A method for manufacturing an organic EL apparatus, the method comprising: forming an organic EL element and a mounting terminal above a first substrate; forming a sealing film so as to cover at least the organic EL element and the mounting terminal; adhering a second substrate with respect to the first substrate using a filler; and etching the sealing film so as to expose at least a part of the mounting terminal, wherein, in the etching of the sealing film, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask.
地址 Tokyo JP