发明名称 |
METHOD FOR MANUFACTURING ORGANIC EL APPARATUS, ORGANIC EL APPARATUS, AND ELECTRONIC DEVICE |
摘要 |
A method for manufacturing an organic EL apparatus includes forming an organic EL element and a mounting terminal on a substrate of an element substrate as a first substrate, forming sealing films so as to cover at least the organic EL element and the mounting terminal, adhering a sealing substrate as a second substrate with respect to the element substrate using a filler, and etching the sealing films so as to expose at least a part of the mounting terminal, in which, in the etching of the sealing films, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask. |
申请公布号 |
US2015287959(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
US201514661934 |
申请日期 |
2015.03.18 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
HANAMURA Yuki |
分类号 |
H01L51/56;H01L51/00;H01L51/52 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
1. A method for manufacturing an organic EL apparatus, the method comprising:
forming an organic EL element and a mounting terminal above a first substrate; forming a sealing film so as to cover at least the organic EL element and the mounting terminal; adhering a second substrate with respect to the first substrate using a filler; and etching the sealing film so as to expose at least a part of the mounting terminal, wherein, in the etching of the sealing film, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask. |
地址 |
Tokyo JP |