| 摘要 |
[Problem] To provide an encoder, an encoder-equipped motor, and a servo system in which detection accuracy can be improved with a simple configuration. [Solution] This encoder comprises: a disk (110); a shaft (SH) to which the disk (110) is fixed; a plurality of slit tracks (SI1, SI2) that are provided to the disk (110), each slit track having a plurality of slits that are lined up along a measurement direction (C) so as to have an incremental pattern; a light source (121) configured so as to emit light to the plurality of slit tracks (SI1, SI2); two light reception arrays (PA1, PA2) that are arranged at positions offset from one another in a width direction (R) that is substantially perpendicular to the measurement direction (C), and that are configured so as to respectively receive light reflected by the corresponding slit tracks (SI1, SI2); and a position data correction unit (138) that, on the basis of light reception signals of the two light reception arrays (PA1, PA2), corrects an error in position data caused by eccentricity between the disk (110) and the shaft (SH). |
