| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technique advantageous for supplying an imprint material accurately in a target region on a substrate.SOLUTION: An imprint device for molding an imprint material on a substrate by using a patterned mold includes a discharge section for discharging the imprint material so as to be supplied onto the substrate, a gas control section for controlling the flow of a gas in a space between the discharge section and substrate, so that the movement of the imprint material discharged from the discharge section is adjusted, and a control section for controlling the gas control section so that the imprint material discharged from the discharge section is supplied in a target region on the substrate.</p> |
