发明名称 POWER DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A power device having fast switching characteristic, while keeping EMI noise to a minimum and a method of fabricating the same are provided. The power device includes a first field stop layer having a first conductivity type, a first drift region formed on the first field stop layer and having a first conductivity type in an impurity concentration that is lower than the first field stop layer, a buried region formed on the first drift region and having the first conductivity type in an impurity concentration that is higher than the first drift region, a second drift region formed on the buried region, a power device cell formed at an upper portion of the second drift region, and a collector region formed below the first field stop layer.
申请公布号 US2015287786(A1) 申请公布日期 2015.10.08
申请号 US201514742328 申请日期 2015.06.17
申请人 FAIRCHILD KOREA SEMICONDUCTOR LTD. 发明人 JEON Jae-duck;KIM Young-chul;PARK Kyeong-seok;KIM Jin-myung;CHOI Young-chul
分类号 H01L29/10;H01L29/66;H01L29/739;H01L21/265;H01L29/36;H01L29/06;H01L21/304 主分类号 H01L29/10
代理机构 代理人
主权项 1. A power device, comprising: a field stop layer having a first conductivity type; a first drift region disposed on the field stop layer and having the first conductivity type in an impurity concentration that is lower than the field stop layer; a buried region disposed on the first drift region and having the first conductivity type in an impurity concentration that is higher than the first drift region; a second drift region disposed on the buried region; a power device cell disposed at an upper portion of the second drift region; and a collector region disposed below the field stop layer.
地址 Bucheon-si KR