Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate

摘要

The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

主权项

1. A processing system for discretized processing of a substrate, the system comprising:
a stage for holding the substrate; a processing cell,
wherein the stage or the processing cell are movable with respect to each other in three dimensions for contacting different site isolated regions on the substrate with the processing cell; a sealing element positioned on a bottom of the processing cell and facing the stage for sealing the processing cell with each of the different site isolated regions; and a delivery tool for delivering processing fluids to the processing cell.