发明名称 |
MEMS MASS-SPRING-DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME |
摘要 |
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed. |
申请公布号 |
US2015285633(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
US201414171691 |
申请日期 |
2014.02.03 |
申请人 |
King Abdullah University of Science and Technology |
发明人 |
Kamal Said Abdel Aziz Ahmed;Sharaf Abdel Hameed;Serry Mohamed Yousef;Sedky Sherif Salah |
分类号 |
G01C19/5719;G01P15/125;G01P15/08 |
主分类号 |
G01C19/5719 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Thuwal SA |