发明名称 SUPPORTING DEVICE AND INSPECTION METHOD
摘要 A supporting device (1) is provided with: a columnar first member (12); and a cylindrical second member (13), which is provided with an inner surface (13b) that can face at least a part of an outer surface (122c) of the first member, and which has at least a part of the first member inserted in a cylinder defined by means of the inner surface. The states of the first and second members can be changed from a first state to a second state, the first state includes a state ensuring a predetermined space (SP1), which is surrounded by means of at least a part (13b-1) of the inner surface of the second member, and a first member end surface (122a) on one side, said end surface being different from the outer surface, and the second state includes a state wherein the second member is relatively moved toward the other side with respect to the first member by having the first and second member positions in the first state as reference.
申请公布号 WO2015152255(A1) 申请公布日期 2015.10.08
申请号 WO2015JP60156 申请日期 2015.03.31
申请人 NIKON CORPORATION 发明人 ISAMI, TADAO
分类号 G01N35/02;C12N15/09;C12Q1/68;G01N21/03;G01N37/00 主分类号 G01N35/02
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