PROCESSING DEVICE AND PROCESSING METHOD

摘要

Provided are a processing device and a processing method with which the device can be made more compact, and with which highly precise processing can be performed. The processing device, which processes a member to be processed by irradiating the member to be processed with a laser, has: a laser output device having multiple vertical cavity surface-emitting laser elements that output laser light having a wavelength of 1070 nm or less, and a substrate on the surface of which the multiple vertical cavity surface-emitting laser elements are arranged in a matrix; a guidance optical system that guides the laser light output from the laser output device; and a control device that controls the output of the laser output device.