发明名称 |
SOLAR CELL MANUFACTURING METHOD AND SUBSTRATE CASSETTE USED THEREIN |
摘要 |
A substrate cassette (50) is provided with: a pair of side surfaces (52) facing each other; a bottom surface (54); a plurality of ribs that are respectively provided on the pair of side surfaces (52) by being aligned with each other in the first direction; and a plurality of supporting grooves (60) that are continuously provided on the pair of side surfaces (52), respectively, by being aligned with each other in the first direction corresponding to intervals between the ribs, said supporting grooves being on the side further toward the bottom surface (54) than the ribs. Each of the supporting grooves (60) is configured from: a first surface (61) that slopes downward in the first direction from the rib side to the bottom surface (54) side; and a second surface (62) that rises from the bottom surface (54) side to the rib side. |
申请公布号 |
WO2015151377(A1) |
申请公布日期 |
2015.10.08 |
申请号 |
WO2015JP00471 |
申请日期 |
2015.02.03 |
申请人 |
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. |
发明人 |
SAITOU, TOMOHIRO;YAMAGUCHI, TSUTOMU |
分类号 |
H01L21/304;H01L21/306;H01L21/673;H01L31/0236;H01L31/18 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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