发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a novel structure.SOLUTION: The semiconductor device, on a semiconductor wafer on which a plurality of chip regions are formed, has a first chip region, a second chip region and a third chip region which are adjacent in a direction from a wafer outer peripheral edge toward the inside of the wafer out of the plurality of chip regions, and has the third chip region arranged with a gap having a first width adjacent to the inside of the wafer further from the second chip region in the direction, and the first chip region arranged with a gap having a second width wider than the first width adjacent to the wafer outer peripheral edge further from the second chip region in the direction.
申请公布号 JP2015179289(A) 申请公布日期 2015.10.08
申请号 JP20150120469 申请日期 2015.06.15
申请人 FUJITSU SEMICONDUCTOR LTD 发明人 NAOE TERUBUMI
分类号 G03F7/20;G03F1/70;H01L21/02 主分类号 G03F7/20
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