COATING APPARATUS AND MANUFACTURING METHOD OF COATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus etc. which forms a coating film, in which degradation caused by air bubbles mixed thereinto is inhibited, and enables easy apparatus management.SOLUTION: A coating apparatus includes: a coating part which coats a coated object with a coating liquid; a storage part which stores the coating liquid supplied to the coating part; and a pipeline for supplying the coating liquid to the storage part from above. An end part of the pipeline located at the side where the coating liquid is discharged includes an opening part for discharging the coating liquid and a bent part which is bent so that the opening part faces upward.