Method for Making a Sensor Device Using a Graphene Layer

摘要

A graphene layer is generated on a substrate. A plastic material is deposited on the graphene layer to at least partially cover the graphene layer. The substrate is separated into at least two substrate pieces.

主权项

1. A sensor device comprising:
a substrate; a graphene layer disposed over the substrate; a plastic material disposed over the graphene layer; electrical contacts coupled to the graphene layer; and an encapsulation body disposed over the plastic material, wherein the encapsulation body comprises an opening exposing the plastic material.